PRODUCTS > Automatic Equipment > Automatic Wafer Handling System for DOA Equipment

Automatic Wafer Handling System for DOA Equipment

Equipment Name

·Automatic Wafer Handling System for DOA Equipment

Equipment Model


Equipment Usage

Integrated wafer loading& unloading, unloading the wafers from the quartz boat to the cassette or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.



· With imported six-axis lift to load/unload and ensures high reliability of picking and placing of wafers.

· With IPC to running master computer software in HMI, high speed data interaction can be realized by network communication.

· With CCD industrial camera to detect dynamic location of quartz boat , which can realize deviation rectification and positioning.

· With cooling system before the unloading process, which can avoid any harmful effect on the wafers and equipment caused by high temperature.

· CCD images show the wafers condition inside the quartz boat, combine with the gripping status of each gripper can realize mis-gripping and wafer dropping detection (optional, standard equipment without this function).

· CCD images analyze the broken wafers in ceramic comb area.(optional).

· MES function, sheet resistance detection and AGV, optional.



9188大乐透走势图带坐标 江西多乐彩十一选五走势图 26选5开奖结果查询 麻将来了app猜猜乐 欢乐捕鱼人手机版 玩呗手机麻将 湖北快3预测推荐三同号 浙江11选5计划 江西11选5走势图 东莞小姐qq 大富翁娱乐app 送9元棋牌? 微乐龙江大庆麻将 天津十一选五走势 查看河北福彩排列七 上海期货配资网 三尾中特最准网站